湿法刻蚀台

名称：WS-1000湿法刻蚀设备Wet Station

产地：美国
品牌：Laurell
湿法设备Wet Station

湿法刻蚀设备特征：
All white polypropylene construction
Any Laurell Spin Processor(s) installed
Easy-access Nitrogen&DI Spray guns
Need a smaller size?-see our MINI

全白色聚丙烯构造
可内置任何Laurell公司的匀胶机（即旋涂仪）
排放简便的入氮口和DI喷头
如果需要更小尺寸——有微型湿法设备Wet Station供选择

GENERAL INFORMATION
湿法刻蚀设备一般信息
The Laurell WS-1000 Series Spin-Process Stations allow a fully configuredtested module to be constructedshipped complete-requiring only the minimum of installation time. Easy to loadoperate-everything is in convenient reach to the operator.
Laurell公司的WS-1000系列旋转处理湿法设备Wet Station可以被配置成测试模块构造，安装简便，易于拆卸，更便于操作者控制。
Typical processes for the WS-1000 include, but are not limited to:
典型的WS-1000湿法刻蚀设备Wet Station处理过程包括（但不限于）：
Coating
Etching
Developing-Aqueous/Solvent
Cleaning-Aqueous/Solvent
Yes, Sulfuric/Peroxide(insitu mixing)
Yes, HBr
Temperature-controlled Developing
Rinsing/Drying
涂敷
蚀刻
开发-水/溶剂
清洗-水/溶剂
确认，硫酸/双氧水（原样混合）
确认，HBr
温控开发
冲洗/烘干
Wet Station Features:
湿法刻蚀设备Wet Station特点：
All polypropylene construction(Self-extinguishing available-see below)
Accommodates the installation of any Laurell spin processor
Perforated wet-deck(easily removable)
Wet plenum
Exhaust Plenum with gauge
Isolated component/drawer below for heaters, pumps, vessels…
全聚丙烯构造（见下文的自灭火功能）
可兼容安装任何Laurell 旋涂机
有排孔的湿隔层（易于拆除）
潮湿的空间
标准规格的排气空间
被热水器，水泵，容器等隔离的组件/容器
Wet StationOptions:
湿法刻蚀设备Wet Station选项：
Processor exhaust interlockcontrol(standard on some models)
Heating&insitu material stirring
Rinse to resistivity
Drain diverter(s)
Vacuum loading wand
Wafer cassette stand
Leak detection
Light towers
排气联锁控制处理器（一些型号是标准的）
加热和原材料搅拌
抵抗力冲洗
排水转向装置
真空负荷棒
晶片盒座
检漏
轻塔

Advanced materials available if required
湿法刻蚀设备Wet Station可以根据要求采用更高级的材料

Better
更好的湿法设备Wet Station
WS-1000-CP5-meets SEMI S93 specification for fire safety in clean room applications. CP5 meets UL94 V-O fire classification. It has an excellent babance of physical properties, chemical resistancefire safety.
WS-1000-CP5 湿法设备Wet Station符合SEMI S93标准应用在消防安全和洁净空间等领域。CP5符合UL94 V-O 火灾分类标准。它具有优良的平衡的物理性能，耐化学药品性和耐火性。

Best
最佳的湿法设备Wet Station
WS-1000-CP7-D-a flame retardant polypropylene formulation who’s flame retardant characteristics meet the most rigorous FMRC 4910 testing standards for most aspects of flame retardation, self-extinguishing characteristicsburn-through. This advanced material also meets or exceeds test standards for low smoke generationminimal toxic by-products.
WS-1000-CP7-D湿法设备Wet Station的材料阻燃特性符合最严格的FMRC 4910测试标准，满足多方面条件下的难燃性，自熄特点和彻底燃烧。这种先进的材料也达到或超过产生低烟和最小毒副产品的检测标准。